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Amorphisation and solid phase epitaxial regrowth of the silicon overlayer in SIMOX structures

✍ Scribed by V.V. Starkov; P.L.F. Hemment; A.F. Vyatkin

Book ID
113282469
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
384 KB
Volume
55
Category
Article
ISSN
0168-583X

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