✦ LIBER ✦

Aluminum oxide mask fabrication by focused ion beam implantation combined with wet etching

✍ Scribed by Liu, Zhengjun; Iltanen, Kari; Chekurov, Nikolai; Grigoras, Kestutis; Tittonen, Ilkka

Book ID: 126523611
Publisher: Institute of Physics
Year: 2013
Tongue: English
Weight: 844 KB
Volume: 24
Category: Article
ISSN: 0957-4484
DOI: 10.1088/0957-4484/24/17/175304

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Potential for size reduction of AlGaAs o

Potential for size reduction of AlGaAs optical channel waveguide structures fabricated by focused ion beam implantation and oxidation

✍ David H Naghski; Joseph T Boyd; Howard E Jackson; Andrew J Steckl 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 97 KB

The Fabrication of THz Emitting Mesas by

The Fabrication of THz Emitting Mesas by Reactive Ion-Beam Etching of Superconducting Bi2212 with Multilayer Masks

✍ H. Koseoglu; F. Turkoglu; Y. Simsek; L. Ozyuzer 📂 Article 📅 2010 🏛 Springer 🌐 English ⚖ 530 KB

Surface morphology and resistivity of al

Surface morphology and resistivity of aluminum oxide films prepared by plasma CVD combined with ion beam irradiation

✍ H. Nakai; J. Shinohara; T. Sassa; Y. Ikegami 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 318 KB

Zn and ZnO nanoparticles fabricated by i

Zn and ZnO nanoparticles fabricated by ion implantation combined with thermal oxidation, and the defect-free luminescence

✍ Amekura, H.; Umeda, N.; Sakuma, Y.; Plaksin, O. A.; Takeda, Y.; Kishimoto, N.; B 📂 Article 📅 2006 🏛 American Institute of Physics 🌐 English ⚖ 366 KB