Aluminum dual damascene metallization for 0.175 μm DRAM generations and beyond (invited)

✍ Scribed by R.F Schnabel; L.A Clevenger; G Costrini; D.M Dobuzinsky; R Filippi; J Gambino; G.Y Lee; R.C Iggulden; C Lin; Z.G Lu; X.J Ning; R Ramachandran; M Ronay; D Többen; S.J Weber

• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 791 KB
• Volume: 50
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(99)00291-9