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Aluminium implantations in copper

✍ Scribed by H.J. Ligthart; E. Gerritsen; P.J. van Den Kerkhoff; S. Hoekstra; R.E. van De Leest; E. Keetels

Book ID
114168075
Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
692 KB
Volume
19-20
Category
Article
ISSN
0168-583X

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To advance the understanding of fundamental physical and chemical processes occurring in ion bombardment of metals, ion beam nitridation of aluminium, iron, copper and gold is studied in the energy range 2-5 keV, at current densities of 1 and 5 lA cm-2, for each ion energy. The concentration proÐles