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AlN substrates: fabrication via vapor phase growth and characterization

✍ Scribed by Melnik, Yu. ;Soukhoveev, V. ;Ivantsov, V. ;Sizov, V. ;Pechnikov, A. ;Tsvetkov, K. ;Kovalenkov, O. ;Dmitriev, V. ;Nikolaev, A. ;Kuznetsov, N. ;Silveira, E. ;Freitas, J.

Book ID
105361889
Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
215 KB
Volume
200
Category
Article
ISSN
0031-8965

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Growth and characterization of bulk AlN
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## Abstract We have grown bulk AlN boules by PVT at different growth temperatures. The grown material is single‐phase wurtzite AlN containing about 100 ppm wt of oxygen; transition metals are present only in the sub‐ppm range. Vibrational spectroscopy shows that structural quality of the single‐cry