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Alloying of solid solutions during liquid-phase epitaxy

✍ Scribed by A. A. Vilisov; V. P. Germogenov


Book ID
112426867
Publisher
Springer
Year
1977
Tongue
English
Weight
297 KB
Volume
20
Category
Article
ISSN
1573-9228

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Fluorine incorporation during Si solid p
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We have investigated the F incorporation and segregation in preamorphized Si during solid phase epitaxy (SPE) at different temperatures and for several implanted-F energies and fluences. The Si samples were amorphized to a depth of 550 nm by implanting Si at liquid nitrogen temperature and then enri