All-silicon bistable micromechanical fiber switch based on advanced bulk micromachining

✍ Scribed by Hoffmann, M.; Kopka, P.; Voges, E.

• Book ID: 117866243
• Publisher: IEEE
• Year: 1999
• Tongue: English
• Weight: 228 KB
• Volume: 5
• Category: Article
• ISSN: 1077-260X
• DOI: 10.1109/2944.748104