Al-free Ti/Mo/Ta/Au-based n-type ohmic contact with a smooth surface for AlGaN/GaN power HEMTs

✍ Scribed by Toshihiro Ohki; Masahito Kanamura; Tsuyoshi Takahashi; Toshihide Kikkawa; Kazukiyo Joshin; Naoki Hara

• Book ID: 104557569
• Publisher: John Wiley and Sons
• Year: 2005
• Tongue: English
• Weight: 147 KB
• Volume: 2
• Category: Article
• ISSN: 1862-6351
• DOI: 10.1002/pssc.200461554