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Al-doped zinc oxide films grown by successive chemical solution deposition

✍ Scribed by A.E. Rakhshani

Book ID
106021078
Publisher
Springer
Year
2008
Tongue
English
Weight
345 KB
Volume
92
Category
Article
ISSN
1432-0630

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✍ G. Luka; L. Wachnicki; B.S. Witkowski; T.A. Krajewski; R. Jakiela; E. Guziewicz; πŸ“‚ Article πŸ“… 2011 πŸ› Elsevier Science 🌐 English βš– 929 KB

We investigated the aluminum distribution in aluminum-doped zinc oxide films grown by atomic layer deposition. Surface morphology, structure, composition and electrical properties of obtained films were studied. For the aluminum content less than 2 at.%, a periodicity of Al distribution along the la