NCKU and Aixtron co-operate on dilute ni
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Article
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2003
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Elsevier Science
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English
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Matheson Tri-Gas Inc's Electronics Group (MTEG) has launched ULTIMA-Sorb, a new and improved solution for hydride abatement. Developed in alliance with ATMI Inc, the ULTIMA-Sorb employs the newest dry abatement technology to abate MOCVD process gases, especially arsine and phosphine.