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[AIP FRONTIERS IN PHYSICS: 3rd International Meeting - Kuala Lumpur (Malaysia) (12–16 January 2009)] AIP Conference Proceedings - Simulation and Experimental Study of a 13.56 MHz Planar Coil, Inductively Coupled Plasma Reactor

✍ Scribed by Jayapalan, K. K.; Chin, O. H.; Chia, Swee-Ping

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