[AIP FRONTIERS IN PHYSICS: 3rd International Meeting - Kuala Lumpur (Malaysia) (12–16 January 2009)] AIP Conference Proceedings - Deposition Of Materials Using A Simple Planar Coil Radio Frequency Inductively Coupled Plasma System

✍ Scribed by Ng, K. H.; Wong, C. S.; Yap, S. L.; Gan, S. N.; Chia, Swee-Ping; Ratnavelu, Kurunathan; Muhamad, Muhamad Rasat

• Book ID: 121277149
• Publisher: AIP
• Year: 2009
• Weight: 837 KB
• Category: Article
• DOI: 10.1063/1.3192288