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Aider: Angle-of-incidence-derivative ellipsometry and reflectometry

✍ Scribed by R.M.A. Azzam


Publisher
Elsevier Science
Year
1976
Tongue
English
Weight
349 KB
Volume
16
Category
Article
ISSN
0030-4018

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Multiple-angle-of-incidence ellipsometry
✍ NL Dmitruk; OS Gorea; TA Mikhailik; VR Romaniuk; LA Zabashta πŸ“‚ Article πŸ“… 1998 πŸ› Elsevier Science 🌐 English βš– 348 KB

In this paper we present results of multiple-angle-of-incidence (MAI) ellipsometry for strained GaAs/GaP x As 1-x superlattices (SL) with the composition x ΒΌ 0.4 and with different layer thickness in the range of 8-80 nm. SLs have been grown on the GaAs (100) substrates by chemical vapour deposition