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Aging of fluorocarbon thin films deposited on polystyrene from hyperthermal C3F+5 and CF+3 ion beams

✍ Scribed by Wijesundara, Muthu B. J.; Zajac, Gerry; Fuoco, Erick; Hanley, Luke

Book ID: 126544428
Publisher: Taylor and Francis Group
Year: 2001
Tongue: English
Weight: 663 KB
Volume: 15
Category: Article
ISSN: 0169-4243
DOI: 10.1163/156856101300189952

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