Surface roughness of sputter-deposited g
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Schug, C.; Schempp, S.; Lamparter, P.; Steeb, S.
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Article
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1999
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John Wiley and Sons
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English
β 255 KB
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We applied grazing incidence x-ray specular and non-specular reΓectivity (GIXR) and small-angle x-ray scattering (SAXS) to study the surface roughness of gold Γlms on quartz glass substrates. Two model systems were prepared : one series of Au Γlms was sputtered in Ar at 3 Γ 10-3mbar (Au1 Γlms) and o