X-ray photoelectron spectroscopy of O 1s and Si 2p lines in films of SiOx formed by electron beam evaporation

✍ Scribed by Y.N. Sun; A. Feldman; E.N. Farabaugh

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 491 KB
• Volume: 157
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(88)90016-8