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AFM and SEM investigation of a Zn-doped silicon surface

โœ Scribed by V. V. Privezentsev

Book ID
111502390
Publisher
Allerton Press Inc
Year
2011
Tongue
English
Weight
494 KB
Volume
75
Category
Article
ISSN
1062-8738

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The tribological properties of a nano-patterned Si surface have been investigated in ambient condition by atomic force microscopy (AFM). The pattern, consisting of parallel grooves, was realized on a Si(0 0 1) single crystal via focused ion beam (FIB) milling. The same technique was used to modify a