AES-SIMS(IMA)study of physical and chemical sputtering processesof low-Z materials by energetic ions

✍ Scribed by M. Mohri; K. Watanabe; T. Yamashina; H. Doi; K. Hayakawa

• Book ID: 107809226
• Publisher: Elsevier Science
• Year: 1979
• Tongue: English
• Weight: 354 KB
• Volume: 85-86
• Category: Article
• ISSN: 0022-3115
• DOI: 10.1016/0022-3115(79)90422-7