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Aerosol assisted chemical vapour deposition of WO3 thin films from tungsten hexacarbonyl and their gas sensing properties

✍ Scribed by Ashraf, Sobia; Blackman, Christopher S.; Palgrave, Robert G.; Naisbitt, Simon C.; Parkin, Ivan P.


Book ID
121420258
Publisher
Royal Society of Chemistry
Year
2007
Tongue
English
Weight
361 KB
Volume
17
Category
Article
ISSN
0959-9428

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Atmospheric pressure chemical vapour dep
✍ K. C. Molloy; P. A. Williams πŸ“‚ Article πŸ“… 2008 πŸ› John Wiley and Sons 🌐 English βš– 163 KB πŸ‘ 2 views

## Abstract The monomeric tungsten oxo‐fluoroalkoxide W(O)(CH~2~CF~3~)~4~ (1) was synthesized from W(O)Cl~4~ and CF~3~CH~2~OH in the presence of ammonia. It was used in atmospheric pressure chemical vapour deposition experiments to deposit non‐stoichiometric WO~2.9~ when used as a single‐source pre