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Aerosol assisted chemical vapour deposition of germanium thin films using organogermanium carboxylates as precursors and formation of germania films

✍ Scribed by ALPA Y SHAH, AMEY WADAWALE, VIJAYKUMAR S SAGORIA, VIMAL K JAIN, C A BETTY, S BHATTACHARYA

Book ID: 118821891
Publisher: Springer-Verlag
Year: 2012
Tongue: English
Weight: 376 KB
Volume: 35
Category: Article
ISSN: 0250-4707
DOI: 10.1007/s12034-012-0302-x

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