Advantages of vapor-plated phosphosilicate films in large-scale integrated circuit arrays

✍ Scribed by Schlacter, M.M.; Schlegel, E.S.; Keen, R.S., Jr.; Lathlaen, R.A.; Schnable, G.L.

• Book ID: 114590009
• Publisher: IEEE
• Year: 1970
• Tongue: English
• Weight: 783 KB
• Volume: 17
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1970.17128