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πŸ“

Advanced Metallization for Ulsi Applications

✍ Scribed by T. S. Cale, F. S. Pintchovski


Publisher
Materials Research Society
Year
1999
Tongue
English
Leaves
379
Series
Materials Research Society
Category
Library

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✦ Subjects


ΠŸΡ€ΠΈΠ±ΠΎΡ€ΠΎΡΡ‚Ρ€ΠΎΠ΅Π½ΠΈΠ΅;ΠŸΠΎΠ»ΡƒΠΏΡ€ΠΎΠ²ΠΎΠ΄Π½ΠΈΠΊΠΎΠ²Ρ‹Π΅ ΠΏΡ€ΠΈΠ±ΠΎΡ€Ρ‹;Π˜Π½Ρ‚Π΅Π³Ρ€Π°Π»ΡŒΠ½Ρ‹Π΅ схСмы;


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This monograph condenses the relevant and pertinent literature on blanket and selective CVD of tungsten (W) into a single manageable volume. The book supplies the reader with the necessary background to bring up, fine tune, and successfully maintain a CVD-W process in a production set-up. Materials