✦ LIBER ✦

Advanced IX projection photolithography

✍ Scribed by M. Hakey; W. Straub

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Projection Photolithography

✍ MANSURIPUR, MASUD; LIANG, RONGGUANG 📂 Article 📅 2000 🏛 Optical Society of America 🌐 English ⚖ 895 KB

Maskless photolithography via holographi

✍ Bay, Christoph; Hübner, Nils; Freeman, Jon; Wilkinson, Tim 📂 Article 📅 2010 🏛 Optical Society of America 🌐 English ⚖ 276 KB

Future developments for 1:1 projection p

✍ King, M.C. 📂 Article 📅 1979 🏛 IEEE 🌐 English ⚖ 565 KB

Comparison of image characteristics in p

✍ G. V. Belokopytov; Yu. V. Ryzhikova 📂 Article 📅 2008 🏛 Allerton Press Inc 🌐 English ⚖ 152 KB

The coherence of excimer laser radiation

✍ K.A. Valiev; L.V. Velikov; G.S. Volkov; D.Yu. Zaroslov 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 640 KB

Focused image holograms in high-resoluti

✍ S. N. Koreshev; V. P. Ratushnyĭ 📂 Article 📅 2006 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 227 KB