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Focused image holograms in high-resolution holographic projection photolithography

✍ Scribed by S. N. Koreshev; V. P. Ratushnyĭ

Book ID: 110175286
Publisher: SP MAIK Nauka/Interperiodica
Year: 2006
Tongue: English
Weight: 227 KB
Volume: 101
Category: Article
ISSN: 0030-400X
DOI: 10.1134/s0030400x0612023x

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