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Adsorption of molecular fluorine on the Si(100) surface: an ellipsometric study

✍ Scribed by V.S. Aliev; V.N. Kruchinin; M.R. Baklanov

Book ID: 116067631
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 604 KB
Volume: 347
Category: Article
ISSN: 0039-6028
DOI: 10.1016/0039-6028(95)00935-3

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