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Adsorption-desorption studies using ESD of CCl2F2, C2H2F2 and C2F6 on tungsten

✍ Scribed by Mario A.B. De Moraes; David Lichtman

Publisher: Elsevier Science
Year: 1985
Weight: 57 KB
Volume: 160
Category: Article
ISSN: 0167-2584
DOI: 10.1016/0167-2584(85)90753-4

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