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Adsorption and decomposition of methylsilanes on Si(100)

✍ Scribed by Masanori Shinohara; Takehiro Maehama; Michio Niwano

Book ID: 108416195
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 252 KB
Volume: 162-163
Category: Article
ISSN: 0169-4332
DOI: 10.1016/s0169-4332(00)00186-0

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