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Adsorption of methylsilane on copper surfaces

✍ Scribed by Michelle J.S Spencer; Graeme L Nyberg


Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
844 KB
Volume
543
Category
Article
ISSN
0039-6028

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✦ Synopsis


The adsorption of methylsilane on the (1 1 1), (1 1 0) and polycrystalline surfaces of copper is examined using vibrational electron energy loss spectroscopy, angle-resolved ultraviolet photoelectron spectroscopy and X-ray photoelectron spectroscopy. On all surfaces, low exposures of methylsilane below )140 Β°C yield chemisorbed CH 3 Si species, while undissociated methylsilane physisorbs at higher exposures. This physisorbed layer then dissociates at higher temperatures to leave CH 3 Si on the surface by room temperature. Above room temperature, the VEELS and ARUP spectra suggest that Si-C bond cleavage occurs on the (1 1 1) surface, whereas the C-H bonds break to leave an SiC molecular species on the (1 1 0) surface. A surface-molecule bonding model is constructed to describe the adsorbatesubstrate interactions and suggests that CH 3 Si adsorbs in a hollow site on the (1 1 1) surface and in a long-bridge site on the (1 1 0) surface.


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