Adsorption of methylsilane on copper surfaces
β Scribed by Michelle J.S Spencer; Graeme L Nyberg
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 844 KB
- Volume
- 543
- Category
- Article
- ISSN
- 0039-6028
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β¦ Synopsis
The adsorption of methylsilane on the (1 1 1), (1 1 0) and polycrystalline surfaces of copper is examined using vibrational electron energy loss spectroscopy, angle-resolved ultraviolet photoelectron spectroscopy and X-ray photoelectron spectroscopy. On all surfaces, low exposures of methylsilane below )140 Β°C yield chemisorbed CH 3 Si species, while undissociated methylsilane physisorbs at higher exposures. This physisorbed layer then dissociates at higher temperatures to leave CH 3 Si on the surface by room temperature. Above room temperature, the VEELS and ARUP spectra suggest that Si-C bond cleavage occurs on the (1 1 1) surface, whereas the C-H bonds break to leave an SiC molecular species on the (1 1 0) surface. A surface-molecule bonding model is constructed to describe the adsorbatesubstrate interactions and suggests that CH 3 Si adsorbs in a hollow site on the (1 1 1) surface and in a long-bridge site on the (1 1 0) surface.
π SIMILAR VOLUMES
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