Addition of silver in copper nitride films deposited by reactive magnetron sputtering
โ Scribed by J.F. Pierson; D. Horwat
- Book ID
- 113897086
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 244 KB
- Volume
- 58
- Category
- Article
- ISSN
- 1359-6462
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๐ SIMILAR VOLUMES
AlN-films prepared by dc reactive magnetron sputtering. AlN in an Ar+N 2 gas mixture have been prepared and their microstructure, hardness, refractive index and IR transmittance examined. At l = 640 nm the refractive index was 1.93 and k = 3ร10 -3 ; high transmission occurred between [??] structure
The studies of thermal stability of nitride coatings are important since their structural, thermal, electrical and optical properties are drastically modified by the oxidation layer formed on the top of these coatings. Tungsten nitride films were deposited from metallic tungsten target using reactiv