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Active micro-mixers using surface acoustic waves on Y-cut 128° LiNbO3

✍ Scribed by Tseng, Wei-Kuo; Lin, Jr-Lung; Sung, Wang-Chou; Chen, Shu-Hui; Lee, Gwo-Bin

Book ID
111912351
Publisher
Institute of Physics
Year
2006
Tongue
English
Weight
882 KB
Volume
16
Category
Article
ISSN
0960-1317

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Surface acoustic wave device properties
Surface acoustic wave device properties of (B, Al)N films on 128° Y–X LiNbO3 substrate
✍ Jen-Hao Song; Jow-Lay Huang; Sean Wu; Sheng-Chang Wang; Jian-Long Ruan; Ding-Fwu 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 416 KB

A c-axis orientated aluminium nitride (AlN) film on a 128 • Y-X lithium niobate (LiNbO 3 ) surface acoustic wave (SAW) device which exhibit a large electromechanical coupling coefficient (k 2 ) and a high SAW velocity property, is needed for future communication applications. In this study, a c-axis