✦ LIBER ✦

Activation of the implanted impurity and transformation of radiation defects in oxidized silicon under RF plasma treatment

✍ Scribed by Ya. VALAKH, M. ;Lysenko, V. S. ;Nazarov, A. N. ;Yu. RUDKO, G. ;Shakhraychuk, N. I.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Transformation of Electrical Activity of

✍ Fedotov, A. ;Drozdov, N. ;Katz, E. ;Ilyashuk, Yu. ;Mazanik, A. ;Ulyashin, A. 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 263 KB 👁 2 views

Effect of Radiation Defects and Elastic

✍ Stelmakh, V. F. ;Sutrtin-belevich, Yu. R. ;Chelyadinskii, A. R. 📂 Article 📅 1989 🏛 John Wiley and Sons 🌐 English ⚖ 236 KB