Activation energy of water vapor and oxygen transmission through TiNxOy/PET gas barrier films

✍ Scribed by M.C. Lin; M.-J. Chen; L.-S. Chang

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 349 KB
• Volume: 256
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2010.05.058

✦ Synopsis

a b s t r a c t Titanium oxynitride (TiN x O y ) films were deposited on polyethylene terephthalate (PET) substrates by means of a reactive radio frequency (RF) magnetron sputtering system in which the power density was the varied parameter. Experimental results show that the deposited TiN x O y films with a thickness of about 55 nm have similar contents of TiN, TiN x O y and TiO 2 bonds, although they are deposited at different power densities. The TiN x O y films deposited at a lower power density have fewer internal defects and grain boundaries and possess higher activation energy and a lower rate of water vapor and oxygen transmission through TiN x O y /PET films.