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Acoustic testing of porous membranes


Book ID
117650917
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
93 KB
Volume
1995
Category
Article
ISSN
0958-2118

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Porous silicon (PS) layers are formed on p+-type silicon wafers by electrochemical anodization in hydrofluoric acid solutions. Microechography and acoustic signature, V(z), have been performed at 1.5 GHz and 600 MHz, respectively, in order to study the elastic properties of PS layers. The thicknesse