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Accurate extraction of contact resistivity on Kelvin D-resistor structures using universal curves from simulation

✍ Scribed by Santander, J.; Lozano, M.; Cane, C.

Book ID: 114535115
Publisher: IEEE
Year: 1993
Tongue: English
Weight: 593 KB
Volume: 40
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.210203

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📜 SIMILAR VOLUMES

[IEEE International Conference on Microe

[IEEE International Conference on Microelectronic Test Structures - Trento, Italy (25-28 March 1996)] Proceedings of International Conference on Microelectronic Test Structures - Universal surfaces for the accurate contact resistivity extraction on Kelvin structures with upper and lower resistive layers

✍ Santander, J.; Lozano, M.; Gotz, A.; Cane, C.; Lora-Tamayo, E. 📂 Article 📅 1996 🏛 IEEE ⚖ 634 KB