Accurate depth profiling of oxidized SiGe (intrinsic or doped) thin films by extended Full Spectrum ToF-SIMS

✍ Scribed by M. Py; E. Saracco; J.F. Damlencourt; J.P. Colonna; E. Martinez; V. Delaye; J.M. Fabbri; J.P. Barnes; J.M. Hartmann

• Book ID: 113823578
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 785 KB
• Volume: 273
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2011.07.057