Accurate depth profiling of dry oxidized SiGeC thin films by extended Full Spectrum ToF-SIMS

✍ Scribed by M. Py; E. Saracco; J.F. Damlencourt; J.P. Barnes; J.M. Fabbri; J.M. Hartmann

• Book ID: 116244446
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 566 KB
• Volume: 257
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2011.06.021