Accurate and computationally efficient analytical 1-D and 2-D ion implantation models based on Legendre polynomials

✍ Scribed by Di Li; Shrivastav, G.; Geng Wang; Yang Chen; Li Lin; Oak, S.; Tasch, A.; Banerjee, S.

• Book ID: 114616767
• Publisher: IEEE
• Year: 2002
• Tongue: English
• Weight: 474 KB
• Volume: 49
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2002.1013273