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Acceptor doping of (Al,Ga)As using carbon by metalorganic vapor phase epitaxy

✍ Scribed by M.A. Tischler; R.M. Potemski; T.F. Kuech; F. Cardone; M.S. Goorsky; G. Scilla

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 454 KB
Volume: 107
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(91)90469-l

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