Absolute surface metrology by differencing spatially shifted maps from a phase-shifting interferometer

✍ Scribed by Bloemhof, E. E.

• Book ID: 115433458
• Publisher: Optical Society of America
• Year: 2010
• Tongue: English
• Weight: 314 KB
• Volume: 35
• Category: Article
• ISSN: 0146-9592
• DOI: 10.1364/OL.35.002346