Absolute measurement of sputtered ion fractions using matrix isolation spectroscopy

✍ Scribed by Ch. Steinbrüchel; D.M. Gruen

• Publisher: Elsevier Science
• Year: 1980
• Weight: 63 KB
• Volume: 93
• Category: Article
• ISSN: 0167-2584
• DOI: 10.1016/0167-2584(80)90322-9