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4921. Measurement of neutral and ion sputtering yields by matrix isolation spectroscopy: Ch. Steinbrüchel and D M Gruen, J Vac Sci Technol, 18 (2), 1981, 235–237


Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
169 KB
Volume
32
Category
Article
ISSN
0042-207X

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