The energy dependence of the partial cross sections of electron-impact dissociation of SF, into the neutral radicals SF, SF, and SF, is measured from the threshold to 200eV. This measurement is accomplished by appearance mass spectrometry in a dual electron beam device. The dissociation products SF,
✦ LIBER ✦
Absolute Cross Sections for the Electron-Impact Dissociation of CF4 and CHF3 into the CFx (x = 1−3) Neutral Radicals
✍ Scribed by H. Sugai; H. Toyoda; T. Nakano; M. Goto
- Publisher
- John Wiley and Sons
- Year
- 1995
- Tongue
- English
- Weight
- 364 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0005-8025
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