About the fluorine chemistry in MCVD: The mechanism of fluorine incorporation into SiO2 layers

✍ Scribed by Dr. J. Kirchhof; Dr. S. Unger; Dr. B. Knappe; Dr. sc. P. Kleinert; A. Funke

• Publisher: John Wiley and Sons
• Year: 1987
• Tongue: English
• Weight: 407 KB
• Volume: 22
• Category: Article
• ISSN: 0232-1300
• DOI: 10.1002/crat.2170220409