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Abnormal glow discharges in Ar: experiments and models

✍ Scribed by Phelps, A V

Book ID
111893066
Publisher
Institute of Physics
Year
2001
Tongue
English
Weight
347 KB
Volume
10
Category
Article
ISSN
0963-0252

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## Abstract The outlines of two methods for numerical simulation ‐ hybrid and PIC/MCC of DC magnetrons are presented. Typical results from both of them are shown and compared. The hybrid model is faster, but has limited validity range. The PIC/MCC model, on the other hand, is stable for all operati