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Ab Initio Chemical Kinetics for SiH 2 + Si 2 H 6 and SiH 3 + Si 2 H 5 Reactions and the Related Unimolecular Decomposition of Si 3 H 8 under a-Si/H CVD Conditions

✍ Scribed by Raghunath, P.; Lin, M. C.

Book ID: 121244346
Publisher: American Chemical Society
Year: 2013
Tongue: English
Weight: 993 KB
Volume: 117
Category: Article
ISSN: 1089-5639
DOI: 10.1021/jp407553a

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