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A versatile and modularizable micromachining process for the fabrication of thermal microsensors and microactuators

✍ Scribed by Friedberger, A; Kreisl, P; Müller, G; Kassing, R


Book ID
127205966
Publisher
Institute of Physics
Year
2001
Tongue
English
Weight
263 KB
Volume
11
Category
Article
ISSN
0960-1317

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