A UV-exposure system using DMD

✍ Scribed by Kohrou Takahashi; Junichi Setoyama

• Book ID: 101357348
• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 385 KB
• Volume: 83
• Category: Article
• ISSN: 8756-663X
• DOI: 10.1002/1520-6432(200007)83:7<56::aid-ecjb8>3.0.co;2-d

✦ Synopsis

The digital micromirror device (DMD) is a new display device fabricated by the micromachining technique and used in projectors. In this paper, the DMD serves as an ultraviolet exposure system and is tested in applications for projection exposure systems and rapid prototyping.