A UV-exposure system using DMD
β
Kohrou Takahashi; Junichi Setoyama
π
Article
π
2000
π
John Wiley and Sons
π
English
β 385 KB
The digital micromirror device (DMD) is a new display device fabricated by the micromachining technique and used in projectors. In this paper, the DMD serves as an ultraviolet exposure system and is tested in applications for projection exposure systems and rapid prototyping.