✦ LIBER ✦

A Two-Wire Silicon Capacitive Accelerometer

✍ Scribed by Toshihito Shirai; Masayoshi Esashi; Noritake Ura

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Capacitive silicon accelerometer with hi

✍ H. Seidel; H. Riedel; R. Kolbeck; G. Mück; W. Kupke; M. Königer 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 562 KB

A MEMS sandwich differential capacitive

✍ Zhang, Yangxi; Yang, Gang; Gao, Chengchen; Hao, Yilong 📂 Article 📅 2013 🏛 Springer-Verlag 🌐 English ⚖ 686 KB

A micromechanical capacitive acceleromet

✍ F. Rudolf 📂 Article 📅 1983 🏛 Elsevier Science ⚖ 529 KB

WP-B6 silicon cantilever beam accelerome

✍ Chen, P.; Muller, R.S.; Shiosaki, T.; White, R.M. 📂 Article 📅 1979 🏛 IEEE 🌐 English ⚖ 155 KB

A capacitive accelerometer using SDB-SOI

✍ Yoshinori Matsumoto; Moritaka Iwakiri; Hidekazu Tanaka; Makoto Ishida; Tetsuro N 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 632 KB

A high performance, variable capacitance

✍ Wilner, L.B. 📂 Article 📅 1988 🏛 IEEE 🌐 English ⚖ 325 KB