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A MEMS sandwich differential capacitive silicon-on-insulator accelerometer

✍ Scribed by Zhang, Yangxi; Yang, Gang; Gao, Chengchen; Hao, Yilong

Book ID: 120573778
Publisher: Springer-Verlag
Year: 2013
Tongue: English
Weight: 686 KB
Volume: 19
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-012-1726-3

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